Applications:
Eyeglasses, reflective mirror, mobile phone backboard, protective cover, optical communication, optical display, etc
Equipment Brief
IKS-OPT2700 is designed for large area optical film coating, It is electron-beam evaporative coating machine. The coating machine system is consist of vacuum chamber, vacuum pump, Vacuum detection and control, substrate heating system, electron beam evaporation system, ion source assisted deposition system, resistance evaporation system, film thickness monitoring system, working gas volume flow control system, workpiece rotation system and automatic coating controlled by PLC.
The evaporation material is commonly used of rare metals, like yttrium fluoride, praseodymium fluoride, germanium, zinc sulfide, magnesium fluoride, titanium dioxide, silicon dioxide, zirconia, cobalt, gallium, selenium, and other metals. Copper, molybdenum, silicon, germanium and other metals are commonly used in the optical materials of reflectors.
It can be coating visible light color film, aluminum reflective film, AF anti-fingerprint film, low melting point organic film, visible light spectroscopic film, visible light anti-reflection film, etc
Equipment Features
IKS-OPT2700 large area optical film coating system, using re-optimization vacuum chamber structure, innovative cryogenic pump layout, stable workpiece rotating frame design, advanced electron beam evaporation system, adjustable uniformity adjustment device and the humanized automatic coating process control, to achieve a stable vacuum process environment, obtained the best coating process, got high quality coated products.
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1. Chamber Size; Ф2700×H1670
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8. floor space: L6×w5.5×H3.5m
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2. Vacuum degree: ultimate vacuum:6×10-4Pa(No load for 24 hours without heating)
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9.Weight:8000kg,Floor weight﹥1000kg/m2
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3. Leak rate:＜4×10-3Pa×L/S(Helium leak checking)
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10.Temperature: At room temperature to 250 ℃, the temperature uniformity ±5%
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4. Working Vacuum:6×10-3Pa(Automatic process start-up)
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11.Power Supply: Three-Phase,380V，50Hz，60-100KW
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5.Low Vacuum:10 minutes＜10Pa
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12.Water Cooling: Chamber flow＞4000L/H, Pump flow＞1800L/H, Refrigeration Compressor＞1600L/H
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6. High Vacuum:6 minutes＜8×10-3Pa
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13.Warm Water: Evaporation Source1800L/H,35-60℃
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7. Vacuum measurement: Whole-process monitoring and real-time point collection
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Technical Parameters
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Film thickness monitoring
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1.PLC integrated control 2. Fine film deposition,0.01nm/s 3. Fast ripe corresponding, linkage with an electron gun
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Flow Control
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Control Range: 3~100sccm，5-500sccm, Precise linkage with an ion source, synchronous control, flow control,
Stable output, the stable ion energy is stable
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E-beam Source
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Type:10KW, A 270 - degree deflection. Ripple less than 0.5%, precise control spot shape, and size, System control operation stability and high accuracy. Gun type: tungsten filament, durable type
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Resistance evaporation source
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Type: Tungsten boat evaporates by heating. Quantity: Two sets of electrodes, choose the installation. Suitable for special coating process, aim at the function materials or metal materials to achieve the function of evaporation
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Ion source
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Type:4KW Hall ion source, High beam, wide Angle of divergence, detachable anode, maintenance, and cleaning is very simple
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Control System
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PC interface: 17inches,1set. TP touch screen:15 inches.1set. Main System: IKS Automatic programmable logic control. The automatic process control system developed by IKS PVD, It’s an intelligent operating system for real-time recording of processes and feedback of faults. Perfect integration humanized design, and meet the personalized needs, to provide a safe and intelligent design of the operation system, Accurate control of the operation.
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Safe design
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Main circuit protection switch, ground protection, Component abnormal alarm, System operation real-time monitoring protection
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Product Superiority
Technological Innovation
- Reasonable integration of products and technological innovation results, improve the process environment, to achieve stable operation of the coating system!
2. Product structure design innovation is reasonable, firm, concise, maintenance is convenient! (user stance design!)
3. Operation and operating system innovation development, simple operation, efficient and practical!
4. Products and process technology to achieve high-quality coating process, improve efficiency, uniformity, excellent repeatability!
5. Achieve intelligent control of coating system operation!
6. Safety system optimization, fault prompt, detailed solve solution!
7. High efficiency, production and management cost reduction!
Technological Feature
1. Product design, by perfect IKS technology and product performance seamless docking integration, to create reliable, stable
Fixed, safe, intelligent coating system!
2. Vacuum acquisition, re-optimized design of the vacuum acquisition system, to meet the rapid and stable vacuum environment!
3. Evaporation source and ion source, reasonable layout, and high-quality processing technology, commissioning technology, to achieve the process
Process automatic adjustment, electron beam innovative structure and accurate rate guarantee material deposition more accurate and stable!
4. The automatic operation control system, the new development of accurate and stable system! Simple setup, easy operation!
Coated product
PVD coating layer thickness of micron scale, with thin thickness, average of 0.1 microns ~ 5 microns, the decorative coating thickness is commonly 0.1microns ~ 1 microns, so it can be almost done not affect the original size of the work-piece, raise all kinds of physical properties and chemical properties on the surface of the work-piece, and can maintain the work-piece size,No further processing is required after PVD coating.
What are the colors of PVD decorative coating that can be coated? We are able to make the color of the film has a sapphire, sky blue, ink blue, shallow golden (0.5 N gold), Japan (1) N gold, gold 24 k gold, imitation gold, champagne gold, zirconium aureate, gray, purple, IP IPS (316 l stainless steel and chromium), IPS (chromium target), rose gold (90%) of gold, rose gold (82%) of gold, rose gold gold (85%), IP black chromium (target), IP black silicon chromium (9:1), IP black (tungsten carbide), rainbow colour, light brown, brown, purple, brown, purple, sky gray, golden, light blue, etc. The color of the coating can be controlled by controlling the parameters in the coating process. After coating, the color value can be measured with relevant instruments, so that the color can be quantified to determine whether the coated color meets the requirements. The main purpose of decorative coating is to improve the decorative properties and color of the appearance of the work-piece, at the same time to make the work-piece more wear-resistant corrosion and prolong its service life; This aspect mainly applies the hardware, the building material, the clock and watch, the jewelry, the mobile phone, the electronic, the digital product, the automobile, the motorcycle, the decoration and so on.
PVD tool coating layer has TiN, TiCN, TiAlN, CrN, TiB2, DLC, AlTiN, TiAlCrN, TiAlCN, tools coating mainly for the purpose of improving surface hardness and wear resistance of work-piece, reduce the friction coefficient of surface, oxidation resistance, improve the service life of the work-piece; This aspect is mainly used in various cutting tools, turning tools (such as gear cutting tools, shaving blades, turning tools, planning tools, milling cutters, drills, cutter grains, etc.), as well as all kinds of molds (such as injection molding, die-casting, stamping, molding) and other products.
If you want to apply PVD coating surface treatment to your products, please contact us now; E-mail:iks.pvd@foxmailexportimescheck, our company can provide PVD coating equipment and PVD coating service.
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